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Industrial gases

Nitrogen trifluoride

Also known as Trifluoroamine, Nitrogen fluoride, Trifluoroammonia

CAS 7783-54-2Formula F3NMolar mass 71.00 g/molEC 232-007-1
GHS signal word: Danger. Pictograms: Oxidiser, Gas under pressure, Harmful or irritant, Serious health hazard 24 suppliers listed
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Nitrogen trifluoride chemical structure, F3N, CAS 7783-54-2
2D chemical structure

Key facts

What buyers check first

All properties
Appearance
Colorless gas [Note: Shipped as a nonliquified compressed gas]
Melting point
-208.8 °C
Boiling point
-128.8 °C
Density
Relative density (water = 1):
Solubility
1.4 × 10⁻⁵ mol NF3/mol H2O at 25 °C and 101.3 kPa
HS code
281290
Category
Industrial gases
UN number
UN 2451
Illustrative photo, a bundle of gas cylinders on a manifold in a chemical plant
Typical packagingIllustrative packaging image, not the actual product

What is Nitrogen trifluoride?

Plain description, key identifiers and synonyms

Nitrogen trifluoride is a nitrogen halide.

Identifiers

Registry numbers, names and line notations, tap to copy

CAS number
7783-54-2 CAS number cross-checked
EC number
232-007-1
Molecular formula
F3N
UNII
4402F4X0RH
MDL number
MFCD00042549
InChIKey
GVGCUCJTUSOZKP-UHFFFAOYSA-N
InChI
InChI=1S/F3N/c1-4(2)3
SMILES (canonical and isomeric)
N(F)(F)F

Synonyms

  • Trifluoroamine
  • Nitrogen fluoride
  • Trifluoroammonia
  • Perfluoroammonia
  • Nitrogen fluoride (NF3)
  • Nitrogen trifluoride, compressed
  • Trifluoramine
  • Trifluorammonia
  • NF(3) gas
  • trifluoroazane
  • trifluoridonitrogen
  • N,N,N-Trifluoroamine #
  • Nitrogen trifluoride 99%
  • N,N-Difluorohypofluorous amide
  • [NF3]
  • UN 2451
  • Nitrogen trifluoride, compressed [UN2451] [Nonflammable gas]

Physical and chemical properties

Measured values and descriptors computed from the structure

Physical and chemical properties

Measured values, check the supplier specification for your grade

Appearance
Colorless gas [Note: Shipped as a nonliquified compressed gas]exp.
Odour
Moldy odorexp.
Melting point
-208.8 °Cexp.
Boiling point
-128.8 °Cexp.
Density
Relative density (water = 1):exp.
Solubility
1.4 × 10⁻⁵ mol NF3/mol H2O at 25 °C and 101.3 kPaexp.
Vapour pressure
33,400 mm Hg at 233 Kexp.

Values vary by grade. Ask suppliers for the COA or TDS of the batch you buy.

Computed descriptors

Calculated from the structure, useful for screening and formulation

Molecular weight
71.00 g/molcalc.
Exact mass
70.9983 Dacalc.
LogP (octanol/water)
0.94calc.
Topological polar surface area
3.24 Ųcalc.
Hydrogen bond donors
0calc.
Hydrogen bond acceptors
1calc.
Rotatable bonds
0calc.
Heavy atoms
4calc.
Rings
0calc.
Aromatic rings
0calc.
Fraction sp3 carbons
0calc.
Formal charge
0calc.
Stereocentres
0calc.

Calculated for screening. Confirm critical figures with the supplier.

Safety and hazards

GHS classification summary, not a safety data sheet

GHS signal word
Danger
GHS03: Oxidiser
Oxidiser
GHS04: Gas under pressure
Gas under pressure
GHS07: Harmful or irritant
Harmful or irritant
GHS08: Serious health hazard
Serious health hazard

Hazard statements

  • H270May cause or intensify fire, oxidiser.
  • H280Contains gas under pressure, may explode if heated.
  • H332Harmful if inhaled.
  • H373May cause damage to organs through prolonged or repeated exposure.
Precautionary statements (12)
  • P220Keep away from clothing and other combustible materials.
  • P244Keep valves and fittings free from oil and grease.
  • P260Do not breathe dust, fume, gas, mist, vapours or spray.
  • P261Avoid breathing dust, fume, gas, mist, vapours or spray.
  • P271Use only outdoors or in a well-ventilated area.
  • P304 + P340If inhaled: Remove person to fresh air and keep comfortable for breathing.
  • P317Get medical help.
  • P319Get medical help if you feel unwell.
  • P370 + P376In case of fire: Stop leak if safe to do so.
  • P403Store in a well-ventilated place.
  • P410 + P403Protect from sunlight. Store in a well-ventilated place.
  • P501Dispose of contents and container in accordance with local regulations.
UN number
UN 2451
Transport hazard class
2.2

GHS classification summary, not a safety data sheet (SDS). Classifications can differ by supplier, grade and concentration. Always check the supplier's SDS.

Full safety data and first aid

Nitrogen trifluoride suppliers

Sponsored listings first, then the documented ranking: membership, verification, replies, completeness, freshness and ratings

All 24 suppliers
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Where suppliers are based

24 suppliers in 8 countries

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Nitrogen trifluoride price

Indicative price range per kg from live supplier offers

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Uses and applications

What the substance is used for, by industry and function

Chamber-cleaning gas in the manufacture of electronics.

Nitrogen trifluoride is preferred to F2 in high-power chemical lasers because of its ease of handling at ambient temperatures. ... Minor uses have been mentioned in the literature: plasma etching of semiconductor materials, production of perfluoroammonium salts, a proposed gas filler to increase the life and brightness of lamps, and as an oxidizing agent in rocketry (not yet commercialized).

The principal use of NF3 is as a fluorine source in the electronics industry.

Oxidizer for high-energy fuels, chemical synthesis.

Industrial uses: Semiconductor and photovoltaic agent, Etching agent, Oxidizing agent, Other.

Consumer uses: Semiconductor and photovoltaic agent.

How it is made

Manufactured by direct fluorination of NH3 or NH4.HF by F2 or by electrolysis of ammonium fluoride-hydrogen fluoride melts.

Only two processes have been technically and economically feasible for large-scale production: the electrolysis of molten ammonium acid fluoride, and the direct fluorination of the ammonia in the presence of molten ammonium fluoride. In the electrolytic process, NF3 is produced at the anode and H2 is produced at the cathode.

Read more

In a divided cell of 4 kA having nickel anodes, extensive dilution of the gas streams with N2 was used to prevent explosive reactions between NF3 and H2. In the direct process, NF3 is produced by the reaction of NH3 and F2 in the presence of molten ammonium acid fluoride. The process uses a specially designed reactor. Because H2 is not generated in this process, the hazards associated with the reactions between NF3 and H2 are eliminated.

Regulatory status

Inventories, regulations and trade controls that list this substance

United States

  • TSCA inventory (USA)
    Status: Active in US commerce

HS code and trade data

Customs classification and reported world trade statistics

Global trade

World import and export statistics for the HS code Nitrogen trifluoride is traded under.

HS 2812.90Indicative HS code

Halides and halide oxides of non-metals, other

World exports in 2024
$572M
+10.6% vs 2023, imports $388M
2019 to 2024
Top exporters
  1. South Korea28.3%
  2. China20.0%
  3. United States18.5%
Top importers
  1. South Korea16.4%
  2. Japan12.3%
  3. Singapore11.5%
Reported customs values in USD, not prices.Full trade data

The HS code shown for Nitrogen trifluoride is indicative (it was assigned by structure rules). Confirm the classification with your customs broker before shipping.

Frequently asked questions

Quick answers about Nitrogen trifluoride, based on the data on this page

What is Nitrogen trifluoride?

Nitrogen trifluoride is a nitrogen halide.

What is the CAS number of Nitrogen trifluoride?

The CAS registry number of Nitrogen trifluoride is 7783-54-2.

What is the molecular formula and weight of Nitrogen trifluoride?

The molecular formula of Nitrogen trifluoride is F3N and its molar mass is 71.00 g/mol.

What is Nitrogen trifluoride used for?

Chamber-cleaning gas in the manufacture of electronics. Nitrogen trifluoride is preferred to F2 in high-power chemical lasers because of its ease of handling at ambient temperatures. ...

Is Nitrogen trifluoride hazardous?

Nitrogen trifluoride carries the GHS signal word "Danger". Main hazards: may cause or intensify fire, oxidiser, contains gas under pressure, may explode if heated, harmful if inhaled. This summary is not an SDS, always read the supplier safety data sheet.

What is the HS code of Nitrogen trifluoride?

Nitrogen trifluoride is usually classified under HS code 281290 (Halides and halide oxides of non-metals, other). This is indicative, confirm it with your customs broker before shipping.

Where can I buy Nitrogen trifluoride?

CompoundList lists 24 suppliers of Nitrogen trifluoride in China, United States, South Korea, Singapore and 4 more. Send one free request to get and compare quotes. Your contact details stay private until you accept a quote.

Where can I buy Nitrogen trifluoride in India?

1 supplier in India list Nitrogen trifluoride on CompoundList. Filter the suppliers list by country and send a request to compare prices, grades and delivery times.

What is the price of Nitrogen trifluoride?

Suppliers quote Nitrogen trifluoride on request because prices depend on grade, purity, quantity and destination. A free request on CompoundList gets you several quotes to compare.

Guides for buyers

Practical guides that help when you source, ship or handle Nitrogen trifluoride

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Data last updated 7 Oct 2026. Details may have changed, please confirm them with the supplier. Report an error on this page
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