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Silanes and silicones

Trichloroethylsilane

Also known as Ethyltrichlorosilane, Trichloro(ethyl)silane, Ethyl silicon trichloride

CAS 115-21-9Formula C2H5Cl3SiMolar mass 163.51 g/molEC 204-072-6
GHS signal word: Danger. Pictograms: Flammable, Corrosive, Acute toxicity (severe), Harmful or irritant 3 suppliers listed
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Trichloroethylsilane chemical structure, C2H5Cl3Si, CAS 115-21-9
2D chemical structure

Key facts

What buyers check first

All properties
Appearance
Liquid
Melting point
-105.6 °C
Boiling point
100.5 °C
Density
1.2373 g/cm³ at 20 °C
Flash point
22 °C
HS code
293190
Category
Silanes and silicones
UN number
UN 1196
Illustrative photo, closed blue jerry cans in a warehouse
Typical packagingIllustrative packaging image, not the actual product

What is Trichloroethylsilane?

Plain description, key identifiers and synonyms

Ethyltrichlorosilane appears as a colorless fuming liquid with a pungent odor. Flash point 57 °F. Boiling point 211.1 °F (99.5 °C). Vapor and liquid may cause burns. Denser than water. Vapors heavier than air.

Identifiers

Registry numbers, names and line notations, tap to copy

IUPAC name
trichloro(ethyl)silane
CAS number
115-21-9 CAS number cross-checked
EC number
204-072-6
Molecular formula
C2H5Cl3Si
UNII
6Q81CH0W5Z
MDL number
MFCD00000485
InChIKey
ZOYFEXPFPVDYIS-UHFFFAOYSA-N
InChI
InChI=1S/C2H5Cl3Si/c1-2-6(3,4)5/h2H2,1H3
SMILES (canonical and isomeric)
CC[Si](Cl)(Cl)Cl

Synonyms

  • Ethyltrichlorosilane
  • Trichloro(ethyl)silane
  • Ethyl silicon trichloride
  • Silane, trichloroethyl-
  • Ethyl trichlorosilane
  • C2H5SiCl3
  • 4-04-00-04227 (Beilstein Handbook Reference)
  • UN 1196
  • trichloroethyl silane
  • Trichloroethylsilane (ethyl trichlorosilane)
  • Trichloroethylsilane {ethyl trichlorosilane}
  • Silane, trichloroethyl
  • Silicane, trichloroethyl
  • Silane, ethyl(trichloro)
  • Ethyltrichlorosilane (DOT)
  • Trichloroethyl silicone
  • TSL 8226
  • LS 120
  • Ls 120 (silane derivative)
  • SIE 4901.0
  • Trichloroethylsilicane
  • Trichloroethylsilicon
  • Silicane, trichloroethyl-
  • Silane, ethyltrichloro-
  • Silane, ethyl(trichloro)-
Show all 29 synonyms
  • ethyl-trichloro-silane
  • Ethyltrichlorosilane, 99%
  • Ethyltrichlorosilane [UN1196] [Flammable liquid]
  • Ethyltrichlorosilane, deposition grade, >=98% (GC), >=99.99% (as metals)

Physical and chemical properties

Measured values and descriptors computed from the structure

Physical and chemical properties

Measured values, check the supplier specification for your grade

Appearance
Liquidexp.
Melting point
-105.6 °Cexp.
Boiling point
100.5 °Cexp.
Density
1.2373 g/cm³ at 20 °Cexp.
Flash point
22 °Cexp.
Solubility
Soluble in carbon tetrachlorideexp.
Vapour pressure
47.2 mm Hg at 25 degexp.

Values vary by grade. Ask suppliers for the COA or TDS of the batch you buy.

Computed descriptors

Calculated from the structure, useful for screening and formulation

Molecular weight
163.51 g/molcalc.
Exact mass
161.9226 Dacalc.
LogP (octanol/water)
2.66calc.
Topological polar surface area
0 Ųcalc.
Hydrogen bond donors
0calc.
Hydrogen bond acceptors
0calc.
Rotatable bonds
1calc.
Heavy atoms
6calc.
Rings
0calc.
Aromatic rings
0calc.
Fraction sp3 carbons
1calc.
Formal charge
0calc.
Stereocentres
0calc.
Lipinski rule of five
Passes (0 violations)calc.

Calculated for screening. Confirm critical figures with the supplier.

Safety and hazards

GHS classification summary, not a safety data sheet

GHS signal word
Danger
GHS02: Flammable
Flammable
GHS05: Corrosive
Corrosive
GHS06: Acute toxicity (severe)
Acute toxicity (severe)
GHS07: Harmful or irritant
Harmful or irritant
332NFPA 704 rating

Hazard statements

  • H225Highly flammable liquid and vapour.
  • H302Harmful if swallowed.
  • H314Causes severe skin burns and eye damage.
  • H331Toxic if inhaled.
Precautionary statements (27)
  • P210Keep away from heat, hot surfaces, sparks, open flames and other ignition sources. No smoking.
  • P233Keep container tightly closed.
  • P240Ground and bond container and receiving equipment.
  • P241Use explosion-proof electrical, ventilating and lighting equipment.
  • P242Use non-sparking tools.
  • P243Take action to prevent static discharges.
  • P260Do not breathe dust, fume, gas, mist, vapours or spray.
  • P261Avoid breathing dust, fume, gas, mist, vapours or spray.
  • P264Wash skin thoroughly after handling.
  • P270Do not eat, drink or smoke when using this product.
  • P271Use only outdoors or in a well-ventilated area.
  • P280Wear protective gloves, protective clothing, eye protection and face protection.
  • P301 + P317If swallowed: Get medical help.
  • P301 + P330 + P331If swallowed: Rinse mouth. Do not induce vomiting.
  • P302 + P361 + P354If on skin: Take off immediately all contaminated clothing. Immediately rinse with water for several minutes.
  • P303 + P361 + P353If on skin (or hair): Take off immediately all contaminated clothing. Rinse skin with water or shower.
  • P304 + P340If inhaled: Remove person to fresh air and keep comfortable for breathing.
  • P305 + P354 + P338If in eyes: Immediately rinse with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing.
  • P316Get emergency medical help immediately.
  • P321Specific treatment (see supplemental first aid instructions on the label).
  • P330Rinse mouth.
  • P363Wash contaminated clothing before reuse.
  • P370 + P378In case of fire: Use appropriate media to extinguish.
  • P403 + P233Store in a well-ventilated place. Keep container tightly closed.
  • P403 + P235Store in a well-ventilated place. Keep cool.
  • P405Store locked up.
  • P501Dispose of contents and container in accordance with local regulations.
UN number
UN 1196
Transport hazard class
3
Packing group
II

GHS classification summary, not a safety data sheet (SDS). Classifications can differ by supplier, grade and concentration. Always check the supplier's SDS.

Full safety data and first aid

Trichloroethylsilane suppliers

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All 3 suppliers

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Where suppliers are based

3 suppliers in 1 country

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Trichloroethylsilane price

Indicative price range per kg from live supplier offers

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Uses and applications

What the substance is used for, by industry and function

Intermediate for silicones.

Industrial uses: Intermediate.

Functional uses

  • Adhesion/cohesion promoter
  • Wetting agent (non-aqueous)

How it is made

By reaction of ethylene and trichlorosilane in the presence of a peroxide catalyst.

Regulatory status

Inventories, regulations and trade controls that list this substance

United States

  • TSCA inventory (USA)
    Status: Active in US commerce

HS code and trade data

Customs classification and reported world trade statistics

Global trade

World import and export statistics for the HS code Trichloroethylsilane is traded under.

HS 2931.90Indicative HS code

Organo-inorganic compounds, other than tetramethyl lead, tetraethyl lead, tributyltin compounds…

World exports in 2024
$3.97B
+5.3% vs 2023, imports $3.93B
2019 to 2024
Top exporters
  1. China28.3%
  2. United States15.6%
  3. Germany15.1%
Top importers
  1. United States14.6%
  2. China13.0%
  3. South Korea8.5%
Reported customs values in USD, not prices.Full trade data

The HS code shown for Trichloroethylsilane is indicative (it was assigned by structure rules). Confirm the classification with your customs broker before shipping.

Frequently asked questions

Quick answers about Trichloroethylsilane, based on the data on this page

What is Trichloroethylsilane?

Ethyltrichlorosilane appears as a colorless fuming liquid with a pungent odor. Flash point 57 °F. Boiling point 211.1 °F (99.5 °C). Vapor and liquid may cause burns. Denser than water. Vapors heavier than air.

What is the CAS number of Trichloroethylsilane?

The CAS registry number of Trichloroethylsilane is 115-21-9.

What is the molecular formula and weight of Trichloroethylsilane?

The molecular formula of Trichloroethylsilane is C2H5Cl3Si and its molar mass is 163.51 g/mol.

What is Trichloroethylsilane used for?

Intermediate for silicones. Industrial uses: Intermediate.

Is Trichloroethylsilane hazardous?

Trichloroethylsilane carries the GHS signal word "Danger". Main hazards: highly flammable liquid and vapour, harmful if swallowed, causes severe skin burns and eye damage. This summary is not an SDS, always read the supplier safety data sheet.

What is the HS code of Trichloroethylsilane?

Trichloroethylsilane is usually classified under HS code 293190 (X. ORGANO-INORGANIC COMPOUNDS, HETEROCYCLIC COMPOUNDS, NUCLEIC ACIDS AND THEIR SALTS…). This is indicative, confirm it with your customs broker before shipping.

Where can I buy Trichloroethylsilane?

CompoundList lists 3 suppliers of Trichloroethylsilane in United States. Send one free request to get and compare quotes. Your contact details stay private until you accept a quote.

What is the price of Trichloroethylsilane?

Suppliers quote Trichloroethylsilane on request because prices depend on grade, purity, quantity and destination. A free request on CompoundList gets you several quotes to compare.

Guides for buyers

Practical guides that help when you source, ship or handle Trichloroethylsilane

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Data last updated 7 Oct 2026. Details may have changed, please confirm them with the supplier. Report an error on this page
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