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Silanes and silicones

Hexamethyldisilazane

Also known as HMDS, Bis(trimethylsilyl)amine, 1,1,1,3,3,3-Hexamethyldisilazane

CAS 999-97-3Formula C6H19NSi2Molar mass 161.40 g/molEC 213-668-5
GHS signal word: Danger. Pictograms: Flammable, Corrosive, Acute toxicity (severe), Harmful or irritant 84 suppliers listed
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Hexamethyldisilazane chemical structure, C6H19NSi2, CAS 999-97-3
2D chemical structure

Key facts

What buyers check first

All properties
Appearance
Colorless liquid
Boiling point
125 °C
Density
0.7741 g/cm³ at 25 °C
Flash point
27 °C
Solubility
Insol in water, reacts slowly
HS code
293190
Category
Silanes and silicones
UN number
UN 2924
Illustrative photo, 200 litre steel drums of liquid in a chemical plant
Typical packagingIllustrative packaging image, not the actual product

What is Hexamethyldisilazane?

Plain description, key identifiers and synonyms

Hexamethyldisilazane is an N-silyl compound obtained from ammonia by replacement of two of the hydrogens with trimethylsilyl groups. Hexamethyldisilazane is a derivatisation agent used in gas chromatography mass spectrometry applications. It has a role as a chromatographic reagent. It derives from a hydride of an ammonia.

Identifiers

Registry numbers, names and line notations, tap to copy

IUPAC name
[dimethyl-(trimethylsilylamino)silyl]methane
CAS number
999-97-3 CAS number cross-checkedOther or deprecated CAS: 27495-70-1, 4039-32-1
EC number
213-668-5
Molecular formula
C6H19NSi2
UNII
H36C68P1BH
MDL number
MFCD00008259
InChIKey
FFUAGWLWBBFQJT-UHFFFAOYSA-N
InChI
InChI=1S/C6H19NSi2/c1-8(2,3)7-9(4,5)6/h7H,1-6H3
SMILES (canonical and isomeric)
C[Si](C)(C)N[Si](C)(C)C

Synonyms

  • HMDS
  • Bis(trimethylsilyl)amine
  • 1,1,1,3,3,3-Hexamethyldisilazane
  • Hexamethylsilazane
  • 1,1,1-Trimethyl-N-(trimethylsilyl)silanamine
  • Silanamine, 1,1,1-trimethyl-N-(trimethylsilyl)-
  • TSL 8802
  • hexamethyl disilazane
  • Disilazane, 1,1,1,3,3,3-hexamethyl-
  • SZ 6079
  • sodium hexamethyldisilazide
  • [dimethyl-(trimethylsilylamino)silyl]methane
  • hexamethyldisilylamine
  • (TMS)2NH
  • Hexamethyl disilylamine
  • ((CH3)3Si)2NH
  • OAP
  • 1,1,3,3,3-Hexamethyldisilazane
  • Trimethyl-N-(trimethylsilyl)silanamine
  • 1,1,1,3,3,3-Hexamethyl-disilazane
  • bis(trimethylsilyl)amine, [dimethyl-(trimethylsilylamino)silyl]methane
  • hexamethyldisilizane
  • C6H19NSi2
  • hexamethyldisilazan
  • hexamethyidisilazane
Show all 35 synonyms
  • hexa-methyldisilazane
  • hexamethyl-disilazane
  • bistrimethylsilylamine
  • Me3SiNHSiMe3
  • bis-(trimethylsilyl)amine
  • (Me3Si)2NH
  • Disilazane,hexamethyl
  • HN(TMS)2
  • 1,1,3,3,3-hexamethyidisilazane
  • 1,1,1,3,3,3-hexamethyldisilazan

Physical and chemical properties

Measured values and descriptors computed from the structure

Physical and chemical properties

Measured values, check the supplier specification for your grade

Appearance
Colorless liquidexp.
Odour
Ammonia-like odorexp.
Boiling point
125 °Cexp.
Density
0.7741 g/cm³ at 25 °Cexp.
Flash point
27 °Cexp.
Autoignition temperature
325 °Cexp.
Solubility
Insol in water, reacts slowlyexp.
Vapour pressure
13.8 mm Hg at 25 °Cexp.

Values vary by grade. Ask suppliers for the COA or TDS of the batch you buy.

Computed descriptors

Calculated from the structure, useful for screening and formulation

Molecular weight
161.40 g/molcalc.
Exact mass
161.1056 Dacalc.
LogP (octanol/water)
2.25calc.
Topological polar surface area
12.03 Ųcalc.
Hydrogen bond donors
1calc.
Hydrogen bond acceptors
1calc.
Rotatable bonds
2calc.
Heavy atoms
9calc.
Rings
0calc.
Aromatic rings
0calc.
Fraction sp3 carbons
1calc.
Formal charge
0calc.
Stereocentres
0calc.
Lipinski rule of five
Passes (0 violations)calc.

Calculated for screening. Confirm critical figures with the supplier.

Safety and hazards

GHS classification summary, not a safety data sheet

GHS signal word
Danger
GHS02: Flammable
Flammable
GHS05: Corrosive
Corrosive
GHS06: Acute toxicity (severe)
Acute toxicity (severe)
GHS07: Harmful or irritant
Harmful or irritant

Hazard statements

  • H225Highly flammable liquid and vapour.
  • H302 + H332Harmful if swallowed. Harmful if inhaled.
  • H302Harmful if swallowed.
  • H311Toxic in contact with skin.
  • H314Causes severe skin burns and eye damage.
  • H332Harmful if inhaled.
  • H412Harmful to aquatic life with long lasting effects.
Precautionary statements (31)
  • P210Keep away from heat, hot surfaces, sparks, open flames and other ignition sources. No smoking.
  • P233Keep container tightly closed.
  • P240Ground and bond container and receiving equipment.
  • P241Use explosion-proof electrical, ventilating and lighting equipment.
  • P242Use non-sparking tools.
  • P243Take action to prevent static discharges.
  • P260Do not breathe dust, fume, gas, mist, vapours or spray.
  • P261Avoid breathing dust, fume, gas, mist, vapours or spray.
  • P262Do not get in eyes, on skin, or on clothing.
  • P264Wash skin thoroughly after handling.
  • P270Do not eat, drink or smoke when using this product.
  • P271Use only outdoors or in a well-ventilated area.
  • P273Avoid release to the environment.
  • P280Wear protective gloves, protective clothing, eye protection and face protection.
  • P301 + P317If swallowed: Get medical help.
  • P301 + P330 + P331If swallowed: Rinse mouth. Do not induce vomiting.
  • P302 + P352If on skin: Wash with plenty of water.
  • P302 + P361 + P354If on skin: Take off immediately all contaminated clothing. Immediately rinse with water for several minutes.
  • P303 + P361 + P353If on skin (or hair): Take off immediately all contaminated clothing. Rinse skin with water or shower.
  • P304 + P340If inhaled: Remove person to fresh air and keep comfortable for breathing.
  • P305 + P354 + P338If in eyes: Immediately rinse with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing.
  • P316Get emergency medical help immediately.
  • P317Get medical help.
  • P321Specific treatment (see supplemental first aid instructions on the label).
  • P330Rinse mouth.
  • P361 + P364Take off immediately all contaminated clothing. And wash it before reuse.
  • P363Wash contaminated clothing before reuse.
  • P370 + P378In case of fire: Use appropriate media to extinguish.
  • P403 + P235Store in a well-ventilated place. Keep cool.
  • P405Store locked up.
  • P501Dispose of contents and container in accordance with local regulations.
UN number
UN 2924

GHS classification summary, not a safety data sheet (SDS). Classifications can differ by supplier, grade and concentration. Always check the supplier's SDS.

Full safety data and first aid

Hexamethyldisilazane suppliers

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All 84 suppliers
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Where suppliers are based

84 suppliers in 14 countries

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Hexamethyldisilazane price

Indicative price range per kg from live supplier offers

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Uses and applications

What the substance is used for, by industry and function

Deactivation of chromatographic support materials. In electronic industry as an adhesion promoter for photoresists on silicon.

The substance is used as a chemical intermediate in the production of siloxane polymers.

Industrial uses: Waterproofing agent, Viscosity modifiers, Surface modifier, Intermediate, Adhesion/cohesion promoter, Binder, Polymerization promoter, Solvent.

Consumer uses: Solvent, Binder, Waterproofing agent.

Pharmacological actions

  • Fixatives

Roles

  • chromatographic reagent
  • reagent

Functional uses

  • Thickening agent

Regulatory status

Inventories, regulations and trade controls that list this substance

United States

  • TSCA inventory (USA)
    Status: Active in US commerce

HS code and trade data

Customs classification and reported world trade statistics

Global trade

World import and export statistics for the HS code Hexamethyldisilazane is traded under.

HS 2931.90Indicative HS code

Organo-inorganic compounds, other than tetramethyl lead, tetraethyl lead, tributyltin compounds…

World exports in 2024
$3.97B
+5.3% vs 2023, imports $3.93B
2019 to 2024
Top exporters
  1. China28.3%
  2. United States15.6%
  3. Germany15.1%
Top importers
  1. United States14.6%
  2. China13.0%
  3. South Korea8.5%
Reported customs values in USD, not prices.Full trade data

The HS code shown for Hexamethyldisilazane is indicative (it was assigned by structure rules). Confirm the classification with your customs broker before shipping.

Frequently asked questions

Quick answers about Hexamethyldisilazane, based on the data on this page

What is Hexamethyldisilazane?

Hexamethyldisilazane is an N-silyl compound obtained from ammonia by replacement of two of the hydrogens with trimethylsilyl groups. Hexamethyldisilazane is a derivatisation agent used in gas chromatography mass spectrometry applications. It has a role as a chromatographic reagent.

What is the CAS number of Hexamethyldisilazane?

The CAS registry number of Hexamethyldisilazane is 999-97-3. Other or deprecated CAS numbers: 27495-70-1, 4039-32-1.

What is the molecular formula and weight of Hexamethyldisilazane?

The molecular formula of Hexamethyldisilazane is C6H19NSi2 and its molar mass is 161.40 g/mol.

What is Hexamethyldisilazane used for?

Deactivation of chromatographic support materials. In electronic industry as an adhesion promoter for photoresists on silicon. The substance is used as a chemical intermediate in the production of siloxane polymers.

Is Hexamethyldisilazane hazardous?

Hexamethyldisilazane carries the GHS signal word "Danger". Main hazards: highly flammable liquid and vapour, harmful if swallowed. harmful if inhaled, harmful if swallowed. This summary is not an SDS, always read the supplier safety data sheet.

What is the HS code of Hexamethyldisilazane?

Hexamethyldisilazane is usually classified under HS code 293190 (X. ORGANO-INORGANIC COMPOUNDS, HETEROCYCLIC COMPOUNDS, NUCLEIC ACIDS AND THEIR SALTS…). This is indicative, confirm it with your customs broker before shipping.

Where can I buy Hexamethyldisilazane?

CompoundList lists 84 suppliers of Hexamethyldisilazane in China, United States, India, Germany and 10 more. Send one free request to get and compare quotes. Your contact details stay private until you accept a quote.

Where can I buy Hexamethyldisilazane in India?

10 suppliers in India list Hexamethyldisilazane on CompoundList. Filter the suppliers list by country and send a request to compare prices, grades and delivery times.

What is the price of Hexamethyldisilazane?

Suppliers quote Hexamethyldisilazane on request because prices depend on grade, purity, quantity and destination. A free request on CompoundList gets you several quotes to compare.

Guides for buyers

Practical guides that help when you source, ship or handle Hexamethyldisilazane

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Data last updated 7 Oct 2026. Details may have changed, please confirm them with the supplier. Report an error on this page
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