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Chlorides and other halides

Chlorosilane

Also known as Silane, chloro-, silylchloride

CAS 13465-78-6Formula H3ClSiMolar mass 66.56 g/molEC 236-705-7
GHS signal word: Danger. Pictograms: Flammable, Gas under pressure, Corrosive, Acute toxicity (severe) 5 suppliers listed
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Chlorosilane chemical structure, H3ClSi, CAS 13465-78-6
2D chemical structure

Key facts

What buyers check first

All properties
CAS number
13465-78-6
Formula
H3ClSi
Molar mass
66.56 g/mol
Physical form
Liquid
HS code
281219
Category
Chlorides and other halides
Illustrative photo, a closed 1000 litre IBC tote in a warehouse
Typical packagingIllustrative packaging image, not the actual product

What is Chlorosilane?

Plain description, key identifiers and synonyms

Chlorosilane is a chemical substance with the molecular formula H3ClSi and a molar mass of 66.56 g/mol. Its CAS registry number is 13465-78-6.

Identifiers

Registry numbers, names and line notations, tap to copy

IUPAC name
chlorosilane
CAS number
13465-78-6 CAS number cross-checked
EC number
236-705-7
Molecular formula
H3ClSi
InChIKey
KOPOQZFJUQMUML-UHFFFAOYSA-N
InChI
InChI=1S/ClH3Si/c1-2/h2H3
SMILES (canonical and isomeric)
[SiH3]Cl

Synonyms

  • Silane, chloro-
  • silylchloride

Physical and chemical properties

Measured values and descriptors computed from the structure

Physical and chemical properties

Measured values, check the supplier specification for your grade

Physical form
Liquidexp.

Values vary by grade. Ask suppliers for the COA or TDS of the batch you buy.

Computed descriptors

Calculated from the structure, useful for screening and formulation

Molecular weight
66.56 g/molcalc.
Exact mass
65.9693 Dacalc.
LogP (octanol/water)
-0.49calc.
Topological polar surface area
0 Ųcalc.
Hydrogen bond donors
0calc.
Hydrogen bond acceptors
0calc.
Rotatable bonds
0calc.
Heavy atoms
2calc.
Rings
0calc.
Aromatic rings
0calc.
Fraction sp3 carbons
0calc.
Formal charge
0calc.
Stereocentres
0calc.

Calculated for screening. Confirm critical figures with the supplier.

Safety and hazards

GHS classification summary, not a safety data sheet

GHS signal word
Danger
GHS02: Flammable
Flammable
GHS04: Gas under pressure
Gas under pressure
GHS05: Corrosive
Corrosive
GHS06: Acute toxicity (severe)
Acute toxicity (severe)

Hazard statements

  • H220Extremely flammable gas.
  • H280Contains gas under pressure, may explode if heated.
  • H314Causes severe skin burns and eye damage.
  • H330Fatal if inhaled.
Precautionary statements (23)
  • P203Obtain, read and follow all safety instructions before use.
  • P210Keep away from heat, hot surfaces, sparks, open flames and other ignition sources. No smoking.
  • P222Do not allow contact with air.
  • P260Do not breathe dust, fume, gas, mist, vapours or spray.
  • P264Wash skin thoroughly after handling.
  • P271Use only outdoors or in a well-ventilated area.
  • P280Wear protective gloves, protective clothing, eye protection and face protection.
  • P284In case of inadequate ventilation wear respiratory protection.
  • P301 + P330 + P331If swallowed: Rinse mouth. Do not induce vomiting.
  • P302 + P361 + P354If on skin: Take off immediately all contaminated clothing. Immediately rinse with water for several minutes.
  • P304 + P340If inhaled: Remove person to fresh air and keep comfortable for breathing.
  • P305 + P354 + P338If in eyes: Immediately rinse with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing.
  • P316Get emergency medical help immediately.
  • P320Specific treatment is urgent (see supplemental first aid instructions on the label).
  • P321Specific treatment (see supplemental first aid instructions on the label).
  • P363Wash contaminated clothing before reuse.
  • P377Leaking gas fire: do not extinguish, unless leak can be stopped safely.
  • P381In case of leakage, eliminate all ignition sources.
  • P403Store in a well-ventilated place.
  • P403 + P233Store in a well-ventilated place. Keep container tightly closed.
  • P405Store locked up.
  • P410 + P403Protect from sunlight. Store in a well-ventilated place.
  • P501Dispose of contents and container in accordance with local regulations.

GHS classification summary, not a safety data sheet (SDS). Classifications can differ by supplier, grade and concentration. Always check the supplier's SDS.

Full safety data and first aid

Chlorosilane suppliers

Sponsored listings first, then the documented ranking: membership, verification, replies, completeness, freshness and ratings

All 5 suppliers
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Suppliers marked Unclaimed profile have not claimed their profile yet. They are not verified by CompoundList, their offers are price on request and details may have changed, so please confirm them with the supplier. Company representatives can claim a profile with a business email on the company's own website domain. Our team verifies each claim and sends the result by email.

Where suppliers are based

5 suppliers in 2 countries

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Chlorosilane price

Indicative price range per kg from live supplier offers

No published prices right now

Suppliers quote this chemical on request. Send one free request and compare quotes side by side.

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Uses and applications

What the substance is used for, by industry and function

Industrial uses: Semiconductor and photovoltaic agent.

Consumer uses: Semiconductor and photovoltaic agent.

Regulatory status

Inventories, regulations and trade controls that list this substance

United States

  • TSCA inventory (USA)
    Status: Active in US commerce

HS code and trade data

Customs classification and reported world trade statistics

Global trade

World import and export statistics for the HS code Chlorosilane is traded under.

HS 2812.19Indicative HS code

Chlorides and chloride oxides, other

World exports in 2024
$159M
+15.9% vs 2023, imports $156M
2019 to 2024
Top exporters
  1. South Korea32.7%
  2. Japan21.7%
  3. Germany16.4%
Top importers
  1. China27.8%
  2. Singapore21.4%
  3. South Korea19.0%
Reported customs values in USD, not prices.Full trade data

The HS code shown for Chlorosilane is indicative (it was assigned by structure rules). Confirm the classification with your customs broker before shipping.

Frequently asked questions

Quick answers about Chlorosilane, based on the data on this page

What is Chlorosilane?

Chlorosilane is a chemical substance with the molecular formula H3ClSi and a molar mass of 66.56 g/mol. Its CAS registry number is 13465-78-6.

What is the CAS number of Chlorosilane?

The CAS registry number of Chlorosilane is 13465-78-6.

What is the molecular formula and weight of Chlorosilane?

The molecular formula of Chlorosilane is H3ClSi and its molar mass is 66.56 g/mol.

What is Chlorosilane used for?

Industrial uses: Semiconductor and photovoltaic agent. Consumer uses: Semiconductor and photovoltaic agent.

Is Chlorosilane hazardous?

Chlorosilane carries the GHS signal word "Danger". Main hazards: extremely flammable gas, contains gas under pressure, may explode if heated, causes severe skin burns and eye damage. This summary is not an SDS, always read the supplier safety data sheet.

What is the HS code of Chlorosilane?

Chlorosilane is usually classified under HS code 281219 (Chlorides and chloride oxides, other). This is indicative, confirm it with your customs broker before shipping.

Where can I buy Chlorosilane?

CompoundList lists 5 suppliers of Chlorosilane in United States and China. Send one free request to get and compare quotes. Your contact details stay private until you accept a quote.

What is the price of Chlorosilane?

Suppliers quote Chlorosilane on request because prices depend on grade, purity, quantity and destination. A free request on CompoundList gets you several quotes to compare.

Guides for buyers

Practical guides that help when you source, ship or handle Chlorosilane

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Data last updated 7 Oct 2026. Details may have changed, please confirm them with the supplier. Report an error on this page
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