CompoundList
Sign in
Chlorides and other halides

Trichlorosilane

Also known as Silane A-19, Silane, trichloro-, Silici-chloroforme

CAS 10025-78-2Formula HCl3SiMolar mass 135.45 g/molEC 233-042-5
GHS signal word: Danger. Pictograms: Flammable, Corrosive, Acute toxicity (severe) 27 suppliers listed
Get quotes Compare 27 suppliers
Trichlorosilane chemical structure, HCl3Si, CAS 10025-78-2
2D chemical structure

Key facts

What buyers check first

All properties
Appearance
Colorless liquid
Melting point
-126.5 °C
Boiling point
31.8 °C
Density
Relative density (water = 1): 1.34
Flash point
-14 °C
HS code
281219
Category
Chlorides and other halides
UN number
UN 1295
Illustrative photo, clear liquid in a volumetric flask on a laboratory bench
Typical packagingIllustrative packaging image, not the actual product

What is Trichlorosilane?

Plain description, key identifiers and synonyms

Trichlorosilane appears as a colorless fuming liquid with a pungent odor. Flash point 7 °F. Vapor and liquid cause burns. More dense than water. Vapors are heavier than air.

Identifiers

Registry numbers, names and line notations, tap to copy

IUPAC name
trichlorosilane
CAS number
10025-78-2 CAS number cross-checked
EC numbers
233-042-5, 419-930-7
Molecular formula
HCl3Si
UNII
QZY2645L6V
MDL number
MFCD00011518
InChIKey
ZDHXKXAHOVTTAH-UHFFFAOYSA-N
InChI
InChI=1S/Cl3HSi/c1-4(2)3/h4H
SMILES (canonical and isomeric)
[SiH](Cl)(Cl)Cl

Synonyms

  • Silane A-19
  • Silane, trichloro-
  • Silici-chloroforme
  • Siliciumchloroform
  • Silicochloroform
  • Silicon chloride hydride (SiHCl3)
  • Trichloorsilaan
  • Trichloromonosilane
  • Trichlorsilan
  • Triclorosilano
  • Cl3HSi
  • Cl3SiH
  • HSiCl3

Physical and chemical properties

Measured values and descriptors computed from the structure

Physical and chemical properties

Measured values, check the supplier specification for your grade

Appearance
Colorless liquidexp.
Odour
ACRID ODORexp.
Melting point
-126.5 °Cexp.
Boiling point
31.8 °Cexp.
Density
Relative density (water = 1): 1.34exp.
Flash point
-14 °Cexp.
Autoignition temperature
182 °Cexp.
Solubility
Solubility in water: reactionexp.
Vapour pressure
Vapor pressure, kPa at 20 °C: 65.8exp.

Values vary by grade. Ask suppliers for the COA or TDS of the batch you buy.

Computed descriptors

Calculated from the structure, useful for screening and formulation

Molecular weight
135.45 g/molcalc.
Exact mass
133.8913 Dacalc.
LogP (octanol/water)
1.42calc.
Topological polar surface area
0 Ųcalc.
Hydrogen bond donors
0calc.
Hydrogen bond acceptors
0calc.
Rotatable bonds
0calc.
Heavy atoms
4calc.
Rings
0calc.
Aromatic rings
0calc.
Fraction sp3 carbons
0calc.
Formal charge
0calc.
Stereocentres
0calc.

Calculated for screening. Confirm critical figures with the supplier.

Safety and hazards

GHS classification summary, not a safety data sheet

GHS signal word
Danger
GHS02: Flammable
Flammable
GHS05: Corrosive
Corrosive
GHS06: Acute toxicity (severe)
Acute toxicity (severe)
432WNFPA 704 rating

Hazard statements

  • H224Extremely flammable liquid and vapour.
  • H260In contact with water releases flammable gases which may ignite spontaneously.
  • H302Harmful if swallowed.
  • H314Causes severe skin burns and eye damage.
  • H318Causes serious eye damage.
  • H331Toxic if inhaled.
Precautionary statements (33)
  • P210Keep away from heat, hot surfaces, sparks, open flames and other ignition sources. No smoking.
  • P223Do not allow contact with water.
  • P231 + P232Handle and store contents under inert gas. Protect from moisture.
  • P233Keep container tightly closed.
  • P240Ground and bond container and receiving equipment.
  • P241Use explosion-proof electrical, ventilating and lighting equipment.
  • P242Use non-sparking tools.
  • P243Take action to prevent static discharges.
  • P260Do not breathe dust, fume, gas, mist, vapours or spray.
  • P261Avoid breathing dust, fume, gas, mist, vapours or spray.
  • P264Wash skin thoroughly after handling.
  • P264 + P265Wash skin thoroughly after handling. Do not touch eyes.
  • P270Do not eat, drink or smoke when using this product.
  • P271Use only outdoors or in a well-ventilated area.
  • P280Wear protective gloves, protective clothing, eye protection and face protection.
  • P301 + P317If swallowed: Get medical help.
  • P301 + P330 + P331If swallowed: Rinse mouth. Do not induce vomiting.
  • P302 + P335 + P334If on skin: Brush off loose particles from skin. Immerse in cool water or wrap in wet bandages.
  • P302 + P361 + P354If on skin: Take off immediately all contaminated clothing. Immediately rinse with water for several minutes.
  • P303 + P361 + P353If on skin (or hair): Take off immediately all contaminated clothing. Rinse skin with water or shower.
  • P304 + P340If inhaled: Remove person to fresh air and keep comfortable for breathing.
  • P305 + P354 + P338If in eyes: Immediately rinse with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing.
  • P316Get emergency medical help immediately.
  • P317Get medical help.
  • P321Specific treatment (see supplemental first aid instructions on the label).
  • P330Rinse mouth.
  • P363Wash contaminated clothing before reuse.
  • P370 + P378In case of fire: Use appropriate media to extinguish.
  • P402 + P404Store in a dry place. Store in a closed container.
  • P403 + P233Store in a well-ventilated place. Keep container tightly closed.
  • P403 + P235Store in a well-ventilated place. Keep cool.
  • P405Store locked up.
  • P501Dispose of contents and container in accordance with local regulations.
UN number
UN 1295
Transport hazard class
4.3
Packing group
I

GHS classification summary, not a safety data sheet (SDS). Classifications can differ by supplier, grade and concentration. Always check the supplier's SDS.

Full safety data and first aid

Trichlorosilane suppliers

Sponsored listings first, then the documented ranking: membership, verification, replies, completeness, freshness and ratings

All 27 suppliers
27 of 27 offers

Suppliers marked Unclaimed profile have not claimed their profile yet. They are not verified by CompoundList, their offers are price on request and details may have changed, so please confirm them with the supplier. Company representatives can claim a profile with a business email on the company's own website domain. Our team verifies each claim and sends the result by email.

Where suppliers are based

27 suppliers in 6 countries

Send one request to many suppliers

Choose up to 10 suppliers or let us match your request. Compare quotes side by side, free.

Choose suppliersPost a request

Trichlorosilane price

Indicative price range per kg from live supplier offers

No published prices right now

Suppliers quote this chemical on request. Send one free request and compare quotes side by side.

Get latest price

Uses and applications

What the substance is used for, by industry and function

In manufacture of transistors.

In organic synthesis.

In the production of high purity silicon metal and as an intermediate for silane adhesion promoters, coupling agents silicon resin intermediates, and surface treatment.

The major application for trichlorosilane is as a raw material for producing high-purity polycrystalline silicon, which eventually becomes the polished silicon wafers used in semiconductor production.

Industrial uses: Intermediate, Viscosity modifiers.

How it is made

Reaction of hydrogen chloride gas passed through silicon or copper silicon powder in fluidized bed.

Prepared from Si and HCl or from SiH4 and HCl in presence of AlCl3.

Trichlorosilane is made by passing hydrogen chloride through silicon powder at a moderate temperature (280 - 300 °C).

Regulatory status

Inventories, regulations and trade controls that list this substance

Europe

  • EU harmonised classification (CLP Annex VI)
    Index no: 014-001-00-9

United States

  • TSCA inventory (USA)
    Status: Active in US commerce

HS code and trade data

Customs classification and reported world trade statistics

Global trade

World import and export statistics for the HS code Trichlorosilane is traded under.

HS 2812.19Indicative HS code

Chlorides and chloride oxides, other

World exports in 2024
$159M
+15.9% vs 2023, imports $156M
2019 to 2024
Top exporters
  1. South Korea32.7%
  2. Japan21.7%
  3. Germany16.4%
Top importers
  1. China27.8%
  2. Singapore21.4%
  3. South Korea19.0%
Reported customs values in USD, not prices.Full trade data

The HS code shown for Trichlorosilane is indicative (it was assigned by structure rules). Confirm the classification with your customs broker before shipping.

Frequently asked questions

Quick answers about Trichlorosilane, based on the data on this page

What is Trichlorosilane?

Trichlorosilane appears as a colorless fuming liquid with a pungent odor. Flash point 7 °F. Vapor and liquid cause burns. More dense than water. Vapors are heavier than air.

What is the CAS number of Trichlorosilane?

The CAS registry number of Trichlorosilane is 10025-78-2.

What is the molecular formula and weight of Trichlorosilane?

The molecular formula of Trichlorosilane is HCl3Si and its molar mass is 135.45 g/mol.

What is Trichlorosilane used for?

In manufacture of transistors. In organic synthesis. In the production of high purity silicon metal and as an intermediate for silane adhesion promoters, coupling agents silicon resin intermediates, and surface treatment.

Is Trichlorosilane hazardous?

Trichlorosilane carries the GHS signal word "Danger". Main hazards: extremely flammable liquid and vapour, in contact with water releases flammable gases which may ignite spontaneously, harmful if swallowed. This summary is not an SDS, always read the supplier safety data sheet.

What is the HS code of Trichlorosilane?

Trichlorosilane is usually classified under HS code 281219 (Chlorides and chloride oxides, other). This is indicative, confirm it with your customs broker before shipping.

Where can I buy Trichlorosilane?

CompoundList lists 27 suppliers of Trichlorosilane in China, United States, Singapore, Czech Republic and 2 more. Send one free request to get and compare quotes. Your contact details stay private until you accept a quote.

What is the price of Trichlorosilane?

Suppliers quote Trichlorosilane on request because prices depend on grade, purity, quantity and destination. A free request on CompoundList gets you several quotes to compare.

Guides for buyers

Practical guides that help when you source, ship or handle Trichlorosilane

Get quotes for Trichlorosilane

Post one free request with your grade, quantity and destination. Matching suppliers send quotes you can compare side by side.
Post a request Sell Trichlorosilane
Data last updated 7 Oct 2026. Details may have changed, please confirm them with the supplier. Report an error on this page
Embed this structure on your websiteShow code

Paste this code into your page to show the 2D structure of Trichlorosilane with a 3D view, its CAS number where known and a link back to this page. Free to use with the link kept.

<iframe src="https://www.compoundlist.com/embed/structure/trichlorosilane-10025-78-2" title="Trichlorosilane structure on CompoundList" width="360" height="420" style="border:1px solid #E7E2DA;border-radius:12px;max-width:100%" loading="lazy" referrerpolicy="strict-origin-when-cross-origin"></iframe>
Preview the embed

Explore more in Chlorides and other halides or HS code 281219

27 suppliers
Free quotes, contact stays private
Get quotes